PECVD, or Plasma-Enhanced
Chemical Vapor Deposition, is a process used in semiconductor
manufacturing to deposit thin films of
various materials onto a substrate.
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Prof. Pravat Kumar Giri
Mr. Gobinda Chhetry
Electro Spinning Device
Model: Super ES-2
Electrospinning is a highly
versatile method to process solutions or melts, mainly of
polymers, into continuous fibers with diameters ranging from a
few micrometers to a few nanometers.
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Prof. Partha Sarathi Gooh Pattader
Mr. Anand Swarup S
RIE
Model: EVG620NT
Reactive Ion Etching is a
dry etching process used in semiconductor manufacturing and
microfabrication to precisely pattern and etch thin films on
substrates using a combination of plasma and reactive gases. RIE
is highly selective and allows for fine control over etching
depth and profile, making it essential for creating
high-resolution features in integrated circuits and
microdevices.
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Prof. Partha Sarathi Gooh Pattader
Mr. Tenison Basumatary
RF Magetron Sputtering
Model: QPREP400
To develop thin films
applied to a wide range of domains, from sensors and electrodes
used in biomedical and energy sectors to thermo-optical
applications in aerospace domains
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Prof. Dr. D. Pamu & Prof. P.K. Giri
Mr. Anand Swarup S
Thermal evaporator
Model:
The equipment is used for
Dry and Wet Oxidation process for growing oxide layers of
various thickness on the surface of silicon wafers. This is also
used for Boron and Phosphorous Diffusion process for doping.
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Prof. Pravat Kumar Giri
Mr. Sandhan Sarma
Laser Micro-Machining
Model: Clark MXR Inc,Impulse Laser
It's a precise material
processing technique that uses a laser to cut, drill, or engrave
materials with high precision.Femtosecond pulse LASER machining
device for micro-patterning on material surfaces.