Dual-drive Surface Acoustic Wave Linear Motors

1. MEMS are the systems comprising of one or many of the sensors, actuators, micro-machines and Integrated circuits.


2. A surface acoustic wave (SAW) motor with a slider with uniform array of projections on its contact faces sandwiched between two piezoelectric stators is capable of making translational motion in forward and reverse directions.


3. The distinct feature of the design is a slider with uniform array of projections on both contact surfaces sandwiched between two identical piezoelectric stators providing friction drive at the contact surfaces.


4. SAW generated on the stator surface interacts with the slider at the line of contact and the frictional force acts on the slider in the direction opposite to the SAW propagation.